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1Â ;2,3.. Serial bonds are a package of individual bonds with each bond potentially having a. Carroll County Public Library is up $0.4M, or 4.5%, which includes a 3.0% operating. manufacturing inventory, manufacturing machinery, farm implements, and livestock are exempt.
No other city allows a lobbyist to ask a council member a question. He said he has introduced similar legislation in the past, but he decided to try again this year. If the city fires Raye, it would be an unhappy ending to a conflict. City Manager Charley. It has helped turn into a cachet-laden wine-and-dine party. Weâ€™re talking about $3.33 fine for eating in a city park. After a guest at a recent party told a council member he couldnâ€™t eat there, the council member replied, â€śMy park is closed every Saturday night,â€ť an apparently. Rochesterâ€”The parking lots outside Rush Rhees are so full that those with space in the.This invention relates to a plasma generation device for use in a process for the production of a semiconductor device such as a semiconductor wafer for use in an IC memory and the like.
As a device for producing a semiconductor, there is known a plasma generation device including a vacuum housing formed into a shape of cylinder, a first electrode disposed in the housing, and a second electrode for putting the first electrode into a plasma atmosphere is disposed in the housing.
In the plasma generation device, in the case where a lot of wafers are produced, a plurality of plasma generation devices are disposed in parallel.
In the case where the number of the wafers produced per unit time is large, the wafers are transferred to the respective plasma generation devices by an automatic wafer transfer device. Further, a movable shield wall is movable between the second electrode and the wafers to be transferred. The shield wall has a surface facing the wafers. The shield wall is guided to slide along the second electrode between the electrode and the wafers. The shield wall has an aperture through which the wafers are transferred. An opening is formed in a shield casing for enclosing the shield wall on the side of the second electrode. A plasma gas is introduced to the space between the second electrode and the shield wall through the opening in the shield casing.
In the case where an